Language
Exposure method
Direct imaging
Board size
334×334~534×622mm
Exposure light source
Laser Diode / 405nm
Resolution
L/S = 12/12μm
Alignment
±10μm
Flow direction
Right to left (R flow) *One-sided machine
Vacuum contact
250×300~510×610mm
2-lamp/5kW ultra-high-pressure mercury lamp
SRO = Φ50 μm
±5μm
Right to left (R flow)
250×300~535×625mm
1-lamp/5kW ultra-high-pressure mercury lamp
L/S = 40/40μm
Left to right (L flow)
①:Left to right (L flow) ②:Left to right (L flow)
Air-press contact
2-lamp/10kW metal halide lamp
φ100μm
254×305~559×635mm
L/S = 75/75μm
±10μm/±5μm
①:Right to left (R flow) ②:Left to right (L flow)
250mm or 500mm
250×330~535×635mm
5kW ultra-high-pressure mercury lamp
250×250~535×635mm
―
334×334~551×640mm
Laser Diode / 375+405nm
L/S = 15/15 μm
±7.5μm