New release
Realize L/S:2/2μm Overlay:±1μm
Direct Imaging Exposure system for WLP / DE-2 W300
Direct Imaging Exposure system for PLP / DE-2 P600
Direct Imaging Exposure system for FO package of cutting edge semiconductor
and Organic package substrate (advanced BGA)
![](data:image/png;base64,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)
[ DE-2 ]
ADTEC Engineering Co., Ltd. (Headquarters: Tokyo, President: Osamu Mizuno) will launch a new direct imaging exposure system for WLP "DE-2 W300" in July, 2021 to customers who manufacture cutting-edge semiconductor FO packages and organic package substrates (advanced BGA); ADTEC will later release a direct imaging exposure system for PLP "DE-2 P600" in December, 2021.
This latest direct imaging exposure system was realized by adopting three advancements: 1) a high-precision stage, 2) achieving an overlay of ± 1 μm and L/S: 2/2 μm, and 3) using the latest optical system. These improvements will increase the precision and resolution capabilities for the production of cutting-edge semiconductor FO packages and organic package substrates. Furthermore, the system will be able to support multi-chip FO by integrating with Adaptive PatterningTM of Deca Technologies *1 of the United States, which announced its collaboration with ADTEC last year.
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)
Please refer to the below URL for the detail information about the collaboration with*1: Deca Technologies.
https://www.adtec.com/info.html?itemid=92&dispmid=683&TabModule689=0
■Contact
ADTEC Engineering Co., Ltd.
WLP Exposure System Division, Sales Department
Phone:+81-3-6369-9805
E-Mail:sales@adtec-eng.co.jp